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Hitachi S-4500 (Field Emission Scanning Electron Microscope)
The S-4500 is a cold field emission SEM with advanced high resolution
imaging at low voltage operation (capable of <1 kV), digital
image processing, versatile sample chamber and stage design,
and thoroughly computer controlled electronics.
The S-4500 has a new objective lens and secondary electron detector
design which provides excellent imaging resolution, particularly
in low voltage operation. The S-4500 has a built-in recursive
frame memory which enhances signal to noise ratio and permits
crystal clear images on CRT monitors at flicker-free TV-scan
rates. This facilitates field selection, focusing, and astigmatism
correction. The frame memory of the S-4500 is expansive. It
has two(2) 1,024 x 1,024 and one(1) 512 x 512 pixel memories.
The 1,024 x 1,024 pixel images may be transferred to magneto-optical
disc or a SUN IPC workstation in a digital format using the
Voyager system.
The S-4500 is computer controlled throughout. It is possible
to control the S-4500 and read out the operating conditions
through an external workstation via RS-232C interface. The S-4500
is currently interfaced with a SUN IPC running Noran's Voyager,
digital image and x-ray spectra acquisition system. |
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Specifications:
- 1.5 nm resolution
- 0.5 - 30 kV accelerating voltage
- 3 stage electromagnetic lens
- 2 secondary electron detectors
- 1 backscattered electron detector
- x-y-z translation, -5° to + 45° tilt, 360° rotation (continuous)
50 mm diameter specimen size Sun IPC running Noran's Voyager,
digital image and x-ray spectra acquisition system.
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