Authors: Kneer, Emil A.; Birnie, Dunbar P. III; Teowee, G.; Podlesny, J.C.
Source: Ferroelectrics 152 (1994) 67-72

Abstract: A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiO_x layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.