Materials Science and Engineering

MSE 488/588 - Scanning Electron Microscopy
Spring Semester

Textbook:

References:

• C.L. Lyman et. al., Scanning Electron Microscopoy, X-Ray Microanalysis, and Analytical Electron Microscopy: A Laboratory Workbook, Plenum Press, 1990.
• D. Briggs and M/P. Seah, Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, John Wiley & Sons, NY, 1985.
• D.E. Newbury, D.C. Joy, P. Cechlin, C. Fiori and J.I. Godstein, Advanced Scanning Electron Microscopy andX-ray Microanalysis, Plenum Press, NY, 1986.

Instructor:

Prerequisites by Topic:

1. Basic Chemistry (atomic theory, bonding, sub-atomic particles, crystallograghy, periodic properties).
2. Basic physics (particle physics, cross sections).
3. Must be currently involved in research project requiring microanalysis and have a fair understanding of research goals.

Method for Assessing Student Knowledge of Prerequisite Topics:

Overall Educational Goal:

Specific Instructional Goals:

1. Acquire the skills and knowledge necessary to carry out SEM/EDX microanalysis of materials, including sample preparation, analysis, interpretation, and presentation of results.
2. Demonstrate the ability to conduct independent research using SEM and/or EDX.
3. Develop a working knowledge of analog and digital image acquisition; imaging software; spectroscopy (X-ray/Auger) software; networked laboratory protocol.
4. Develop oral, computer, and written presentation skills.

Course Topics (Class Hours):

1. Electron optics and SEM instrumentation (4)
2. Electron-beam/specimen interactions (5)
3. Generation andinterprestation of images (5)
4. Qualitative and quantitative X-ray microanalysis (6)
5. Special techniques: EBIC, CDL, V contrast, e-channelilng, electronic testing, lithography, particle/thin-film analysis (5)
6. Related techniques: Auger spectroscopy, SAM, AEM, TEM, FIB, EELS (5)

Class Requirements:

1. Two lecture sessions per week.
2. One laboratory session per week.
3. Two quizzes, followed by class discussion.
4. Two exams
5. Two written laboratory reports, with group and individual portions.
6. Term paper/independent research; student report, rough draft returned after editing; final draft with images/spectra.
7. One image with text designed for internet or general audience.
8. *Note: Graduate-Level: Requirements include additional lab work.

Computer Usage:

1. Extensive use of Computer Network Laboratory for Microscopy Education; for reference, data collection, storage, manipulation, and presentation.
2. Image acquisition, processing, and analysis labs require the use of Emispec, HIG Image, X-View or other.
3. Energy dispersive X-ray analysis labs reqire the student to use software for set-up of system, qualitative and quantitative analysis.
4. Use of WWW imaging software and Microscopy list server for current topics.

Laboratory Projects:

1. Operation precedure of the SEM. Practical exam. (3 weeks)
2. Sample preparation techniques. (1 week)
3. Measurement of beam parameters and calibration. (1 week)
4. Imaging strategies, detector lusage, image processing and analysis. Report required. (4 weeks)
5. Energy dispersive X-ray analysis. Report required. (3 weeks)
6. Student research projects. Report required. (3 weeks)

Assessment of Course Goals:

1. Practical examination on operation procedures.
2. Written examinations over lecture materials.
3. Laboratory reports (2) on imaging and spectroscopy.
4. Research report (term paper) on independent project.

Contribution to Professonal Component: