Materials Science and Engineering
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MSE 446/546
Semiconductor Processing
Fall Semester
2001-2002 Catalog Data: MSE 446/546 Semiconductor Processing
(3) I Silicon and compound semiconductor materials preparation, bulk crystal growth, wafering, epitaxial growth, photolithography, doping, ion implantation, etching, oxidation, metallization, silicon and compound semiconductor device processing. (Identical with ECE 446). May be convened with MSE 546.
Instructor:
Dr. Kenneth Jackson, Professor of Materials Science and Engineering
Textbook:
Handbook of Semiconductor Technology, Volume 2, Processing of Semiconductors, Ed. by Kenneth A. Jackson, Published by Wiley-VCH, Weinheim, Germany.
Overall Educational Goal:
Course Topics:
Semiconductor Processing
Silicon Processing
Compound Semiconductor Processing
Epitaxial Growth
Photolithography
Doping
Etching
Silicon Device Structures
Compound Semiconductor Device Structures
Silicon Device Processing
Compound Semiconductor Device Processing
Assessment of Course Goals:
For Undergraduate Credit
Quizzes (2)
30%
Final Examination
30%
Reports (2)
40%
For Graduate Credit
Quizzes (2)
20%
Final Examination
20%
Reports (2)
30%
Paper
30%
Contribution to Professional Component:
Engineering Science:
1 unit
Engineering Design:
2 units
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